Usagawa, Toshiyuki
Ueda, Kazuhiro
Nambu, Akira
Yoneyama, Akio
Kikuchi, Yota
Watanabe, Atsushi
Article Title: Pt–Ti–O gate silicon–metal–insulator–semiconductor field-effect transistor hydrogen gas sensors in harsh environments
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-11-06
Date Accepted: 2016-03-28
Online publication date: 2016-05-26