Tanabe, Akira
Uehara, Takuya
Nagase, Kazuro
Ikedo, Hiroaki
Hiroshiba, Nobuya
Nakamura, Takahiro
Nakagawa, Masaru
Article Title: Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-11-28
Date Accepted: 2016-02-03
Online publication date: 2016-05-17