Cho, Byoung-Jun
Kim, Jin-Yong
Hamada, Satomi
Shima, Shohei
Park, Jin-Goo
Article Title: Effect of pH and chemical mechanical planarization process conditions on the copper–benzotriazole complex formation
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-11-10
Date Accepted: 2016-03-07
Online publication date: 2016-05-18