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Simulation study for lifetime distribution of middle-of-line time-dependent dielectric breakdown affected by global and local spacing variations

Published Online: 2016-05-17

Published Print: 2016-06-01

Authors

Yokogawa, Shinji
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Text and Data Mining valid from 2016-05-17
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Article Title: Simulation study for lifetime distribution of middle-of-line time-dependent dielectric breakdown affected by global and local spacing variations

Journal Title: Japanese Journal of Applied Physics

Article Type: paper

Copyright Information: © 2016 The Japan Society of Applied Physics

Publication dates

Date Received: 2015-10-10

Date Accepted: 2016-02-10

Online publication date: 2016-05-17

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