Kozawa, Takahiro
Santillan, Julius Joseph
Itani, Toshiro
Article Title: Analysis of stochastic effects in chemically amplified poly(4-hydroxystyrene-co-t-butyl methacrylate) resist
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-02-20
Date Accepted: 2016-04-13
Online publication date: 2016-06-06