Suzuki, Kenta
Youn, Sung-Won
Hiroshima, Hiroshi
Article Title: Bubble-free high-speed UV nanoimprint lithography using condensable gas with very low global warming potential
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-02-01
Date Accepted: 2016-04-06
Online publication date: 2016-06-09