Yamamoto, Masashi
Umemoto, Hironobu
Ohdaira, Keisuke
Shikama, Tomokazu
Nishiyama, Takashi
Horibe, Hideo
Article Title: Oxygen additive amount dependence of rate of photoresist removal by H radicals generated on a tungsten hot-wire catalyst
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-02-21
Date Accepted: 2016-04-12
Online publication date: 2016-06-14