Sugawara, Hirotake
Ogino, So
Article Title: Fundamental study on filter effect of confronting divergent magnetic fields applied to low-pressure inductively coupled plasmas
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-11-29
Date Accepted: 2016-03-13
Online publication date: 2016-06-13