Lin, Tzu-Ken
Wuu, Dong-Sing
Huang, Shih-Yung
Wang, Wei-Kai
Article Title: Characteristics of yttrium fluoride and yttrium oxide coatings for plasma process equipment prepared by atmospheric plasma spraying
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-07-12
Date Accepted: 2016-09-06
Online publication date: 2016-11-14