Kozawa, Takahiro
Santillan, Julius Joseph
Itani, Toshiro
Article Title: Relationship between sensitizer concentration and resist performance of chemically amplified extreme ultraviolet resists in sub-10 nm half-pitch resolution region
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2017 The Japan Society of Applied Physics
Publication dates
Date Received: 2016-08-13
Date Accepted: 2016-10-03
Online publication date: 2016-11-25