Sonoda, Yuki
Ohdaira, Keisuke
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Effect of antireflection coating on the crystallization of amorphous silicon films by flash lamp annealing
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-10-12
Date accepted: 2016-12-13
Online publication date: 2017-03-17