Yoshiba, Shuhei
Tanitsu, Katsuya
Suda, Yoshiyuki
Kamisako, Koichi
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Effect of the Ti/Si ratio of spin coating solutions on surface passivation of crystalline silicon by TiOx–SiOxcomposite films
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2017-01-31
Date accepted: 2017-03-31
Online publication date: 2017-05-31