Mamezaki, Daiki
Harada, Tetsuo
Nagata, Yutaka
Watanabe, Takeo
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Imaging performance improvement of coherent extreme-ultraviolet scatterometry microscope with high-harmonic-generation extreme-ultraviolet source
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-12-08
Date accepted: 2017-02-23
Online publication date: 2017-05-18