Koyama, Masanori
Shirai, Masamitsu
Kawata, Hiroaki
Hirai, Yoshihiko
Yasuda, Masaaki
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Computational study on UV curing characteristics in nanoimprint lithography: Stochastic simulation
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-12-07
Date accepted: 2017-02-06
Online publication date: 2017-05-18