Ishikawa, Kenji
Karahashi, Kazuhiro
Ichiki, Takanori
Chang, Jane P.
George, Steven M.
Kessels, W. M. M.
Lee, Hae June
Tinck, Stefan
Um, Jung Hwan
Kinoshita, Keizo
Journal title: Japanese Journal of Applied Physics
Article type: rev
Article title: Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2017-03-10
Date accepted: 2017-03-28
Online publication date: 2017-06-01