Ohba, Tomihito
Yang, Wenbing
Tan, Samantha
Kanarik, Keren J.
Nojiri, Kazuo
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-12-29
Date accepted: 2017-03-16
Online publication date: 2017-05-25