Tabata, Masahiro
Tsuji, Akihiro
Katsunuma, Takayuki
Honda, Masanobu
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Benefit of precise control of surface reaction by new patterning technique for small-contact etching with TiN hard mask
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2017-02-10
Date accepted: 2017-03-15
Online publication date: 2017-05-30