Kasashima, Yuji
Tsutsumi, Kota
Mitomi, Shinzo
Uesugi, Fumihiko
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Development and evaluation of magnesium oxide-based ceramics for chamber parts in mass-production plasma etching equipment
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-11-19
Date accepted: 2016-12-31
Online publication date: 2017-04-28