Tsunoura, Toru
Yoshida, Katsumi
Yano, Toyohiko
Kishi, Yukio
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-11-20
Date accepted: 2017-01-11
Online publication date: 2017-05-02