Nishida, Kentaro
Ono, Kouichi
Eriguchi, Koji
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Optical model for spectroscopic ellipsometry analysis of plasma-induced damage to SiOC films
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-12-31
Date accepted: 2017-02-06
Online publication date: 2017-05-16