Tamura, Takahiro
Takami, Takuya
Yanase, Takashi
Nagahama, Taro
Shimada, Toshihiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: N2plasma etching processes of microscopic single crystals of cubic boron nitride
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2016-11-22
Date accepted: 2016-12-26
Online publication date: 2017-05-02