Tahara, Daisuke
Nishinaka, Hiroyuki
Morimoto, Shota
Yoshimoto, Masahiro
Journal title: Japanese Journal of Applied Physics
Article type: note
Article title: Stoichiometric control for heteroepitaxial growth of smooth ε-Ga2O3thin films onc-plane AlN templates by mist chemical vapor deposition
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2017-04-23
Date accepted: 2017-05-12
Online publication date: 2017-06-22