Van Toan, Nguyen https://orcid.org/0000-0001-8946-8299
Ono, Takahito
Journal title: Japanese Journal of Applied Physics
Article type: rev
Article title: Progress in performance enhancement methods for capacitive silicon resonators
Copyright information: © 2017 The Japan Society of Applied Physics
Publication dates
Date received: 2017-05-16
Date accepted: 2017-07-25
Online publication date: 2017-09-29