Nakai, Yuri
Kanaya, Kazuya
Tanigawa, Hiroshi
Suzuki, Kenichiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Silicon p–n diode actuators with depletion layer embedded in a beam of cantilever
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-09-26
Date accepted: 2017-10-10
Online publication date: 2017-12-08