Kozawa, Takahiro
Santillan, Julius Joseph
Itani, Toshiro
Funding for this research was provided by:
New Energy and Industrial Technology Development Organization (Ｊ165101160)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Electron–hole pairs generated in ZrO2nanoparticle resist upon exposure to extreme ultraviolet radiation
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-04
Date accepted: 2017-11-28
Online publication date: 2018-01-17