Fujise, Jun
Ko, Bonggyun
Ono, Toshiaki
Tanaka, Masaki
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Measurement and empirical equation of critical stresses for slip generation from oxide precipitates in silicon wafers
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-09-21
Date accepted: 2017-11-28
Online publication date: 2018-01-31