Kanda, Kazuhiro https://orcid.org/0000-0002-4724-5369
Takamatsu, Hiroki
Miura-Fujiwara, Eri
Akasaka, Hiroki
Saiga, Akihiro
Tamada, Koji
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP17K06799)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-09-29
Date accepted: 2017-12-18
Online publication date: 2018-02-22