Fujimura, Nobuyuki
Ohta, Akio
Ikeda, Mitsuhisa
Makihara, Katsunori
Miyazaki, Seiichi
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Direct evaluation of electrical dipole moment and oxygen density ratio at high-kdielectrics/SiO2interface by X-ray photoelectron spectroscopy analysis
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-09
Date accepted: 2018-01-13
Online publication date: 2018-03-15