Litta, Eugenio Dentoni https://orcid.org/0000-0003-0333-376X
Ritzenthaler, Romain
Schram, Tom
Spessot, Alessio
O’Sullivan, Barry
Machkaoutsan, Vladimir
Fazan, Pierre
Ji, Yunhyuck
Mannaert, Geert
Lorant, Christophe
Sebaai, Farid
Thiam, Arame
Ercken, Monique
Demuynck, Steven
Horiguchi, Naoto
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-10
Date accepted: 2018-01-17
Online publication date: 2018-03-16