Kishida, Ryo
Furuta, Jun
Kobayashi, Kazutoshi
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Evaluation of plasma-induced damage and bias temperature instability depending on type of antenna layer using current-starved ring oscillators
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-10
Date accepted: 2017-12-25
Online publication date: 2018-03-08