Yoshida, Tetsuya
Maekawa, Keiichi
Tsuda, Shibun
Shimizu, Tatsuo
Ogasawara, Makoto
Aono, Hideki
Yamaguchi, Yasuo
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Revisited study of fluorine implantation impact on negative bias temperature instability for input/output device of automotive micro controller unit
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-09
Date accepted: 2018-01-10
Online publication date: 2018-03-15