Kutsuki, Katsuhiro
Murakami, Yuki
Watanabe, Yukihiko
Onishi, Toru
Yamamoto, Kensaku
Fujiwara, Hirokazu
Ito, Takahiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Effect of surface roughness of trench sidewalls on electrical properties in 4H-SiC trench MOSFETs
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-10-02
Date accepted: 2017-11-17
Online publication date: 2018-02-19