Miyazaki, Fumito
Baba, Kazuki
Tanigawa, Hiroshi
Furutsuka, Takashi
Suzuki, Kenichiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Evaluation of a silicon 5 MHz p–n diode actuator with a laterally vibrating extensional mode
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-12-20
Date accepted: 2018-02-06
Online publication date: 2018-04-03