Suo, Hiromasa https://orcid.org/0000-0003-1836-1384
Tsukimoto, Susumu
Eto, Kazuma
Osawa, Hiroshi
Kato, Tomohisa
Okumura, Hajime
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Evaluation of the increase in threading dislocation during the initial stage of physical vapor transport growth of 4H-SiC
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-01-26
Date accepted: 2018-02-21
Online publication date: 2018-05-02