Kuyama, Tomohiro
Eriguchi, Koji
Funding for this research was provided by:
Japan Society for the Promotion of Science (15H04159)
Japan Society for the Promotion of Science (16K14405)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Optical and electrical characterization methods of plasma-induced damage in silicon nitride films
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-01-11
Date accepted: 2018-03-09
Online publication date: 2018-05-29