Zhang, Xufang
Okamoto, Dai https://orcid.org/0000-0003-2494-1764
Hatakeyama, Tetsuo
Sometani, Mitsuru
Harada, Shinsuke
Iwamuro, Noriyuki
Yano, Hiroshi
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Impact of oxide thickness on the density distribution of near-interface traps in 4H-SiC MOS capacitors
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-12-08
Date accepted: 2018-03-09
Online publication date: 2018-05-16