Duan, Ningyuan
Wang, Guilei
Xu, Jing
Mao, Shujuan
Luo, Xue
Zhang, Dan
Wang, Wenwu
Chen, Dapeng
Li, Junfeng
Liu, Shi
Zhao, Chao
Ye, Tianchun
Luo, Jun
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Enhancing the thermal stability of NiGe by prior-germanidation fluorine implantation into Ge substrate
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-12-04
Date accepted: 2018-04-20
Online publication date: 2018-06-20