Nakajima, Shinya
Takei, Satoshi
Takamatsu, Soichiro
Mizui, Kento
Oka, Toshitaka
Matsumoto, Yoko
Sekiguchi, Atsushi
Hanabata, Makoto
Funding for this research was provided by:
Japan Society for the Promotion of Science (16K04920)
Japan Science and Technology Agency (VP29117936791)
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Gas-permeable templates using cellulose derivatives with acrylate and methacrylate groups for reducing in void defect density in ultraviolet nanoimprint lithography
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-02-28
Date accepted: 2018-04-23
Online publication date: 2018-07-13