Nakajima, Mizuki
Uchida, Yuki
Satoh, Nobuo
Yamamoto, Hidekazu
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Nanoscale investigation of the silicon carbide double-diffused MOSFET with scanning capacitance force microscopy
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-01-14
Date accepted: 2018-04-12
Online publication date: 2018-07-18