Ishida, Kazumasa
Ozaki, Nobuhiko https://orcid.org/0000-0002-3890-7842
Ohsato, Hirotaka
Watanabe, Eiichiro
Ikeda, Naoki
Sugimoto, Yoshimasa
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Non-destructive and non-contact measurement of semiconductor optical waveguide using optical coherence tomography with a visible broadband light source
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-02-01
Date accepted: 2018-05-01
Online publication date: 2018-07-10