Tsuneishi, Asuka
Uchiyama, Sachiyo
Hayashi, Ryouta
Taki, Kentaro
Kozawa, Takahiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Relationship between C=C double bond conversion and dissolution kinetics in cross-linking-type photoresists for display manufacture, studied by real-time Fourier transform infrared spectroscopy and quartz crystal microbalance methods
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-04-17
Date accepted: 2018-06-06
Online publication date: 2018-07-25