Kim, Min Gee https://orcid.org/0000-0002-6556-1867
Ohmi, Shun-ichiro
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Ferroelectric properties of undoped HfO2 directly deposited on Si substrates by RF magnetron sputtering
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2018-06-05
Date accepted: 2018-07-12
Online publication date: 2018-09-19