Shojiki, Kanako
Hayashi, Yusuke
Uesugi, Kenjiro
Miyake, Hideto
Journal title: Japanese Journal of Applied Physics
Article type: paper
Article title: Local and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy
Copyright information: © 2019 The Japan Society of Applied Physics
Publication dates
Date received: 2018-12-28
Date accepted: 2019-02-28
Online publication date: 2019-05-09