Okumura, Hironori http://orcid.org/0000-0002-5464-9169
Tanaka, Taketoshi
Funding for this research was provided by:
Japan Society for the Promotion of Science (16H06424)
Article Title: Dry and wet etching for β-Ga2O3 Schottky barrier diodes with mesa termination
Journal Title: Japanese Journal of Applied Physics
Article Type: paper
Copyright Information: © 2019 The Japan Society of Applied Physics
Publication dates
Date Received: 2019-10-01
Date Accepted: 2019-10-21
Online publication date: 2019-11-06