Miyake, Hideto
Nishio, Gou
Suzuki, Shuhei
Hiramatsu, Kazumasa
Fukuyama, Hiroyuki
Kaur, Jesbains
Kuwano, Noriyuki
Article Title: Annealing of an AlN buffer layer in N2–CO for growth of a high-quality AlN film on sapphire
Journal Title: Applied Physics Express
Article Type: paper
Copyright Information: © 2016 The Japan Society of Applied Physics
Publication dates
Date Received: 2015-10-02
Date Accepted: 2015-12-11
Online publication date: 2016-01-06