Takahashi, Kazuhiro
Fujie, Toshinori
Sato, Nobutaka
Takeoka, Shinji
Sawada, Kazuaki
Funding for this research was provided by:
Japan Society for the Promotion of Science (26709025, 15H05355)
Japan Science and Technology Agency (JPMJPR1526, JPMJPR152A)
Journal title: Japanese Journal of Applied Physics
Article type: lett
Article title: MEMS optical interferometry-based pressure sensor using elastomer nanosheet developed by dry transfer technique
Copyright information: © 2018 The Japan Society of Applied Physics
Publication dates
Date received: 2017-09-14
Date accepted: 2017-10-17
Online publication date: 2017-12-08