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Azimuthal Beam Scanning Microscope Design and Implementation for Axial Localization with Scanning Angle Interference Microscopy

Crossref DOI link: https://doi.org/10.1007/978-1-0716-1803-5_7

Published Online: 2021-11-27

Published Print: 2022

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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