Problems with Obtaining Materials for the Protection of Integrated Circuits from High-Velocity Streams of Microparticles and Possible Solutions
Crossref DOI link: https://doi.org/10.1007/978-3-030-04158-8_1
Published Online: 2019-01-29
Published Print: 2019
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Belous, Anatoly
Saladukha, Vitali
Shvedau, Siarhei
Text and Data Mining valid from 2019-01-01
Chapter History
First Online: 29 January 2019