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Damage-Free Atomic-Scale Etching and Surface Enhancements by Electron-Enhanced Reactions: Results and Simulations

Crossref DOI link: https://doi.org/10.1007/978-3-030-18778-1_26

Published Online: 2021-01-26

Published Print: 2021

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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