Modeling Self-organization of Adsorbate at Chemical Vapor Deposition in Accumulative Ion Plasma Devices
Crossref DOI link: https://doi.org/10.1007/978-3-030-52268-1_8
Published Online: 2020-11-24
Published Print: 2020
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kharchenko, Vasyl O.
Dvornichenko, Alina V.
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Chapter History
First Online: 24 November 2020